Manufacturing System of SKE

Kyoto Plant

Kumiyama Plant Concept

Outline table of Kumiyama Plant: Five floors
(4 above-ground; 1 underground)
(Floors 1 through 3 are clean rooms); Building Area：798.79m²; Site Area：2,945.05m²

Six Concepts behind the Kumiyama Plant Construction

1. An open, unconstructed space

Constructed without the use of pillars, the plant facilitates equipment layout design, and maximizes the effective use of space.

2. Energy Conservation

Energy conservation was designed into every aspect of the plant - from energy-saving construction materials to solar power generation - resulting in lower running costs.

3. Integration with the Local Region

The external design and selected colors for the plant blend in harmoniously with the local scenery.

4. Outstanding Reliability

The building features an overall earthquake-resistant construction, and all major pieces of equipment have been outfitted with the latest in vibration-dampening technologies. As photomasks grow in size, drawing time increases as well, proportionately raising the risk associated with power outages. To minimize this risk, we installed an internal backup power generation unit.

5. Improved Production Environment

Dust particles of even a few microns in size cannot be allowed into the photomask production line. Air, filtered to remove particles of one micron or larger, circulates down from the ceiling, while dust from inside the room is vacuumed out through the floor in a “downflow” system. This system has been implemented on all floors of the building. Human labor is reduced to a minimum through robot transport within the facility, and other measures have been implemented to ensure the best clean room environment for each area.

6. Harmonization with Older Lines

SK-Electronics owns other production lines already in existence on the same site as the Kumiyama Plant. Connecting both facilities via clean corridor, we have been able to maximize the efficient use of equipment in each line, increasing production efficiency.

What is Manufactured at the Kumiyama Plant

The Kumiyama Plant is capable of mass-producing photomasks for panels up to 8th generation in size.

A photomask for an 8th generation panel is in excess of one meter on a side, requiring a high-precision pattern of just a few microns in line thickness (μm. 1μm = 1/1000mm).

The Kumiyama Plant is also capable of producing multi-tone photomasks that require extremely advanced technologies. Multi-tone photomasks are expected to be in greater demand in the future to facilitate display visual quality improvements and production efficiency improvements.

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