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Kyoto Plant

Kyoto Plant Concept

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Six Concepts behind the Kyoto Plant Construction

1. An open, unconstructed space

Constructed without the use of pillars, the plant facilitates equipment layout design, and maximizes the effective use of space.

2. Energy Conservation

Energy conservation was designed into every aspect of the plant - from energy-saving construction materials to solar power generation - resulting in lower running costs.

3. Integration with the Local Region

The external design and selected colors for the plant blend in harmoniously with the local scenery.

4. Outstanding Reliability

The building features an overall earthquake-resistant construction, and all major pieces of equipment have been outfitted with the latest in vibration-dampening technologies. As photomasks grow in size, drawing time increases as well, proportionately raising the risk associated with power outages. To minimize this risk, we installed an internal backup power generation unit.

5. Improved Production Environment

Dust particles of even a few microns in size cannot be allowed into the photomask production line. Air, filtered to remove particles of one micron or larger, circulates down from the ceiling, while dust from inside the room is vacuumed out through the floor in a “downflow” system. This system has been implemented on all floors of the building. Human labor is reduced to a minimum through robot transport within the facility, and other measures have been implemented to ensure the best clean room environment for each area.

6. Harmonization with the Shiga Plant

The Kyoto plant complements the Shiga plant and aims to maximise production efficiency.

What is Manufactured at the Kyoto Plant

The Kyoto Plant is capable of mass-producing photomasks for panels up to 8th generation in size.

A photomask for an 8th generation panel is in excess of one meter on a side, requiring a high-precision pattern of just a few microns in line thickness (μm. 1μm = 1/1000mm).

The Kyoto Plant is also capable of producing multi-tone photomasks that require extremely advanced technologies. Multi-tone photomasks are expected to be in greater demand in the future to facilitate display visual quality improvements and production efficiency improvements.

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